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Cyberoptics Semiconductor - WaferSense® Auto Leveling System 2 Vertical ALS2V


Optimize equipment setup.

Enhance process uniformity with objective and reproducible level adjustments.

Reduce equipment maintenance time with wireless measurement.

Reduce particles and increase yield with improved equipment set-up.

Wafer-shaped: Available in 150mm, 200mm and 300mm wafer sizes.

Highly accurate: Measures horizontal and vertical leveling to 0.03 and 0.05 degrees respectively.

Wireless: Transmits data wirelessly to your laptop or PC in real-time.

Easy-to-use software: LevelView and LevelReview application software displays numerical and graphical inclination data letting you see the effects of your adjustments in real time, speeding equipment alignment and returning it to productive use faster.

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