Contact htt
Back to top
Close Menu

Cyberoptics Semiconductor - WaferSense® Auto Vibration System AVS


Speed equipment qualification with wireless measurements.

Shorten equipment maintenance cycles with wafer-like accelerometer.

Lower equipment expenses with objective and reproducible data.

Optimize equipment productivity and yield by maximizing acceleration and minimizing vibration.

Wafer-shaped: Available in 200mm and 300mm wafer sizes.

Highly accurate: Measures acceleration in three directions. x, y and z. with a range of +-2G, resolution of +-0.01G and frequency response 0 to 200 Hz, -3dB.

Wireless: Transmits data to your laptop of PC in real-time.

Easy-to-use software: VibeView and VibeReview application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.

Download Datasheet
Direct Contact

Cyberoptics Semiconductor - WaferSense® Auto Vibration System AVS

By clicking on the video, you agree that your data will be transmitted to Vimeo and that you have read the privacy policy.

Relevant Products