Contact htt
Back to top
Close Menu

Cyberoptics Semiconductor - WaferSense® Airborne Particle Sensor™ APS1, 2 & 3


Speed equipment qualification with wireless measurements.

Shorten equipment maintenance cycles with wafer-like form factor.

Lower equipment expenses with objective and reproducible data.

Wafer-shaped: Available in 150mm, 200mm, and 300mm wafer sizes.(APS3 in 300 mm only)

Measures particles greater than .14 microns Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.

Wireless: Transmits particle data to your laptop or PC in real-time.

Easy-to-use software: ParticleSpectrum™ application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.


Download Datasheet
Direct Contact