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Cyberoptics Semiconductor - WaferSense® Auto Multi Sensor™ AMS


Speed equipment qualification with wireless measurements.

Shorten equipment maintenance cycles with thin and lightweight wafer-like form factor.

Lower equipment maintenance expenses and enhance process uniformity with objectiveand reproducible data.

Wireless, wafer-shaped and battery-powered. Available in 150mm, 200mm, 300mm.

Reports inclination in three dimensions. x, y and vertical

Reports Accelerations in three dimensions. x, y and z

Humidity accuracy. +/- 2% RH

Thin. 4.5mm thick

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