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Cyberoptics Semiconductor - WaferSense® Auto Vibration System AVS


Speed equipment qualification with wireless measurements.

Shorten equipment maintenance cycles with wafer-like accelerometer.

Lower equipment expenses with objective and reproducible data.

Optimize equipment productivity and yield by maximizing acceleration and minimizing vibration.

Wafer-shaped: Available in 200mm and 300mm wafer sizes.

Highly accurate: Measures acceleration in three directions. x, y and z. with a range of +-2G, resolution of +-0.01G and frequency response 0 to 200 Hz, -3dB.

Wireless: Transmits data to your laptop of PC in real-time.

Easy-to-use software: VibeView and VibeReview application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.

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