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Cyberoptics Semiconductor - EX-Q


The EX-Q Wafer Mapping Sensor - A Dramatic Step Forward in Wafer Detection.

Our EX-Q wafer mapping sensor offers quick and reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs. This off-the-shelf sensor has ample detection headroom (sensitivity) allowing it to easily detect thin and dark-coated wafers of any size. It also has no moving parts that could result in particulate contamination.

EX-Q is available in four standoff distances: 1.5", 2.2", 3.0" and 4.5".

Detects bright, dark and coated wafers in various size and edge geometries at factory gain setting.

Insensitive to interference from the mapping environment including stray reflections.

Easy-to-use, off-the-shelf direct interface requires no amplification or signal conditioning and reduces tool total cost of ownership.

Non-intrusive wafer mapping solution protects valuable wafers from inadvertent crashes.

No moving parts that can result in particulate contamination.

Detects cross-slotted and ultra-thin wafers.

Note: Connector is an option and must be specified when ordered.

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