QES Mechatronic Sdn. Bhd. - Wafer Sorting System - WHS2200B
Designed for wafer sorting between cassettes. Use of Hirata Dual Arm ATM Robot with 4 load ports design. Accept 6" & 8" Open Cassettes. Integrated with Wafer Alignment and OCR reader module.
Key Features:
- For 6" & 8" Wafers
- Various sorting method and customization according to requirement.
- 4x universal Load ports for 6" and 8" open cassette without conversion.
- Cassette Slot Mapping function integrated.
- Wafer Notch and OF Alignment module.
- IOSS OCR Reader.
- SECS/GEM interface for mapping & recipe file transfer host computer.
- Wafer flipping option for thin and thick/heavy Wafer material
- Edge Grip including Flipping available
- Edge Grip Aligner available
Key Features:
- For 6" & 8" Wafers
- Various sorting method and customization according to requirement.
- 4x universal Load ports for 6" and 8" open cassette without conversion.
- Cassette Slot Mapping function integrated.
- Wafer Notch and OF Alignment module.
- IOSS OCR Reader.
- SECS/GEM interface for mapping & recipe file transfer host computer.
- Wafer flipping option for thin and thick/heavy Wafer material
- Edge Grip including Flipping available
- Edge Grip Aligner available
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QES Mechatronic Sdn. Bhd. - Wafer Sorting System - WHS2200B
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