Contact htt
Back to top
Close Menu
Semiconductor Production
Back
Semiconductor Lab
Back
Electronics
Back
Wafer Reader
Back
Probecards
Back
Home | Suppliers | Cyberoptics Semiconductor | In- line Particle Sensor™ (IPS™)

Cyberoptics Semiconductor - In- line Particle Sensor™ (IPS™)


In- line Particle Sensor™ (IPS™)
Cyberoptics Semiconductor

cyberoptics.com/semiconductor/
Real Time 24/7 Monitoring

Based on our WaferSense® Airborne Particle Sensor™ technology, IPS utilizes a high power blue laser to quickly monitor, identify and enable troubleshooting of particles down to 0.1μm within gas and vacuum lines in semiconductor process equipment.

- Speed equipment qualification with real-time 24/7 monitoring

- Shorten equipment maintenance cycles with inline particle sensing

- Lower equipment expenses with objective and reproducible data



Download Datasheet
Direct Contact

Relevant Products

->

Show product details
MPI - Thermal
ThermalAir Accessories
Temperature Chambers & Thermal Test Enclosure
->

Show product details
Coherent
Easy Mark
Decapsulation System
->

Show product details
MPI - Thermal
ThermalAir TA-1000A ThermalAir Desktop Series Temperature Forcing System
-25°C to +200°C
->

Show product details
Thermo Scientific ESD
MK1
Low Pin Count ESD and Latch-Up Test System
->

Show product details
Cyberoptics Semiconductor
ReticleSense® Airborne Particle Sensor APSR
Improve equipment set-up and long term yields by wirelessly monitoring airborne particles in real-time.
->

Show product details
Cyberoptics Semiconductor
EXQS
Wafer Mapping Sensors
->

Show product details
Cyberoptics Semiconductor
WaferSense® Auto Vibration and Leveling Sensor™ AVLS3
Speed simultaneous vibration and leveling measurements.
->

Show product details
Cyberoptics Semiconductor
AVLS3 Auto Vibration and Leveling Sensor
WaferSense® Auto Vibration and Leveling Sensor
->

Show product details
Cyberoptics Semiconductor
In- line Particle Sensor™ (IPS™)
24/7 detection of small particles in gas and vacuum lines.
->

Show product details
Cyberoptics Semiconductor
WaferSense® Auto Leveling System 2 Vertical™ (ALS/ALS2V)
Speeds setting the right inclination by measuring pitch, roll, rise overrun and vertical inclinations. Quickly and accurately set the same level across tools for better process uniformity.
->

Show product details
Cyberoptics Semiconductor
WaferSense® Auto Teaching System™ 2 (ATS2)
Auto Teaching Sensor ATS2
On-board image processor reports x-y-z offset from the teaching wafer to a target inside the equipment so you can teach wafer transfer coordinates.
->

Show product details
Cyberoptics Semiconductor
ReticleSense® Auto Teaching System™ (ATSR)
->

Show product details
Cyberoptics Semiconductor
EX-Q
Wafer Mapping Sensors
->

Show product details
Cyberoptics Semiconductor
ReticleSense® Auto Multi Sensor™ AMSR
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
->

Show product details
Cyberoptics Semiconductor
WaferSense® Airborne Particle Sensor™ APS3
Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time. Thinner. Lighter. Precision Accuracy.
->

Show product details
Cyberoptics Semiconductor
WaferSense® Auto Vibration System AVS
Speed monitoring 3-axis accelerations and vibration to reduce particles, maintenance time and cycle time.
->

Show product details
Cyberoptics Semiconductor
SQ 3000 AOI
High Precision Accuracy with Multi-Reflection Suppression (MRS) Sensor Technology
->

Show product details
Cyberoptics Semiconductor
APSRQ ReticleSense® Airborne Particle Sensor
Improve equipment set-up and long term yields by wirelessly monitoring airborne particles in real-time.
->

Show product details
Cyberoptics Semiconductor
WaferSense® Auto Resistance Sensor™ (ARS)
Real time resistance measurement of plating cell contacts.
->

Show product details
Cyberoptics Semiconductor
WaferSense® Auto Multi Sensor™ AMS
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
->

Show product details
Cyberoptics Semiconductor
WaferSense® Auto Gapping System AGS
Improve Uniformity and Yield with WaferSense AGS for Accurate and Repeatable Setups